1.設備主要規格

二手進口拋光機-二手cmt研磨拋光機-雙面研磨拋光機/POL機床出售轉讓
動力3相220V，50Hz
設備尺寸1800L x1550W x2850H（電氣/空氣箱除外）
控制觸摸屏和PLC控制
氣壓5~6Kg/cm?。

板尺寸波爾φ 384 x φ 1140 x55T[SUS410]

R.P.M46 R.P.M（逆變驅動）
發動機7.5千瓦x4P

方法 蝸輪（DEC.RATE 1/25）箱式傳動

發動機3.7千瓦x4P

方法蝸輪（DEC.RATE 1/60）箱傳動

部空氣壓力。 氣缸φ 180X550ST（低摩擦氣缸）

設置工件大小sunarscale unitcontrol（研磨）

ts運營商載體尺寸P.C.D φ 423.34[Dp=12/Z=200]
插入量5EA
工作尺寸

內齒輪

P.C.D φ 1185.34[Dp=12/Z=560]


R.P.M23R.P.M（伺服電機 驅動器）

發動機HC-SFS352[3.5 kW]

方法行星齒輪DEC.DR IVE（dec.rate 1/14）

上下齒輪馬達0.4 kW.1/60

太陽齒輪P.C.D φ 338.67[Dp=12/Z=160]


R.P.M

29R.P.M（伺服驅 動）

發動機

HC-SFS152[1.5 kW]

方法行星geardec，dr ive（1 2月率1/60）

上下

手動操作

雙面拋光機

二手進口雙面拋光機

Product Description


1.Main specifications of the equipment

Type

Items

0thers

Power

3 phase 220V,50Hz


Equipment size

1800L x 1550W x 2850H(except Elec./AIR box)


Control

Touch screen &PLC control


AIR pressure

5~6 Kg/cm2Max.


Plate size

POL

φ384 x φ1140 x 55t[SUS410]


Bot tom plate par ts

R.P.M

Max.46 R.P.M(inver ter drive)

Motor

7.5Kw x 4P
Method

worm gear (Dec.rate 1/25)box drive

Top plate par ts

R.P.M

Max.20 R.P.M(inverter dr ive)

3.7Kw x 4P


Method

worm gear(Dec.rate 1/60)box drive

Top air pres.

cylinder

φ 180x 550st(low friction cylinder)

Work size setting

sunar scale unit control(LAPPING)

Carrier par ts

Carrier size

P.C.D φ423.34 [Dp=12/Z=200]


Inserting amount5EAWORK SIZE

Internal gear

P.C.D φ1185.34 [Dp=12/Z=560]

R.P.MMax.23 R.P.M(servo tordr ive)


HC-SFS352[3.5Kw]

Methodplanet ear dec.dr ive (dec.rate 1/14)

Up-Downgeared 0.4Kw.1/60

35stsun gearP.C.D φ338.67 [Dp=12/Z=160]


R.P.MMax.29 R.P.M(servo dr ive)

HC-SFS152[1.5Kw]


Methodplanet gear dec,dr ive (dec.rate 1/60)


Up-Downmanual operation

※ Above specification can be changed for the better per formance at any time.

2.Basic things of the equipment

1)Basic concept of the equipment

This equipment uses 4-WAY mode and gives the movement from the 4 mode to the work.

The top and bottom plates,sun gear,and internal gear do the rotation independent ly and it can process both side of the work,so the process stress is small and improves parallel and plane diagram of the work.

4-WAY mode does the planet movement on the plate in full,so the one side wear can be reduced and it is possible to adjust the range of the air pressure using the electric regulator.

With the 4-WAY movement and using accurately calculated gear ratio,the problem that happens to the carrier when keeping and maintaining the work can be reduced.

Through this,the thin carrier can be used and the process of the thin work and longer lifespan of the carrier are possible.

2)Development of the equipment and its character istics

CMT has been developing the precision plane gr inder which improved the basic characteristics of the thin film products.

Especially,we are trying to study and develop the high precision planar ization that can process the crystal,oxide,silicon wafer,thin film glass,etc.thin and securely at the section and both side gr inding device.

0ur both side LAP/POL MACHINE is designed and produced to show its efficiency considering its characteristics as the machine tool.

Meant ime,Europe or Japan made machines have been introduced to Korea but because of their high price it has been hard to invest and some Korean companies introduced but there has been some problems due to their poor efficiency.

In producing this both side LAP/POL MACHINE,we'd Iike to give you some help.Fur thermore, we will try hard to improve our technical skills and improvement of the product.

? Cont inuously var iable transmission of LAP/POL top/bottom plate

Top/bot tom plates work separately and they do continuously variable transmit within the Max. 20 R.P.M(top/bottom plates)range through each inver ter drive.The touch screen shows the current R.P.M of the plate.

? Cont inuously var iable transmission of internal and sun gears

INTERNAL/SUN gears can do the individual CVT within the internal Gear Max.23 R.P.M/Sun Gear 29 R.P.M range thr ough the servo motor and rotate the gr inding direction of the carrier and work.

? Working processor can be applied using the touch screen

To optimize the working condition of each models,it uses the touch screen and inputs and process the pressure,top-bot tom plates rotation,and sun gear rotation data in each step.

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